Coating Equipment
Batch Coating Systems
Systec SVS IMPAX line of batch coating systems includes standard series of IMPAX coaters as well as their modifications for customized applications. The IMPAX coaters encompass industrial-scale mass production systems engineered to satisfy the demands of real-world manufacturing operations. If you need a versatile system for depositing a wide variety of coatings on numerous type of components or tools of varying dimensions and different lot sizes, the batch coater is your ideal system choice.
In terms of deposition technology, IMPAX coaters take advantage of the newest coating technologies to produce functional (wear-, corrosion-resistant and low-friction coatings) and decorative coatings. Among modern technologies, used in IMPAX machines is HIPIMS Sputtering (internal link to Technologies), allowing to produce extremely hard and dense sputtered films with the properties exceeding those of regular coatings. Another novel technology (patented by Systec SVS) is an extension of UBM sputtering, which received the name a-UBM (advanced UBM), is a driver behind the NoveLC family of amorphous carbon (DLC) coatings. This technology allows deposition of the DLC coatings, which are much harder and more wear-resistant than similar offerings on the market. Finally, the coaters can be equipped with specially designed cathodic arc sources, providing high target utilization and deposition rates, decreased number and size of the microdroplets.
The IMPAX line is designed and manufactured in top quality standards with leading edge deposition technologies integrated in the coaters. The coaters can be provided with up to 5 rectangular deposition sources (arc, sputtering or their combination) or alternatively with multiple round sputtering or arc sources. The coaters are supplied with all necessary peripheral devices, including load carriers, turntables and so on. On request, Systec SVS can also provide fixtures for holding the parts during deposition. IMPAX coaters are usually supplied in a compact version with all the components mounted on one common frame. This layout allows for easy transportation and quick and cost-effective installation of the system at the customer site. In case, if the common frame design is not suitable, separating of the chamber and other components is certainly possible.
POSSIBLE CONFIGURATIONS FOR IMPAX COATING SYSTEM
|
Deposition Technology |
Features |
Coating possibilities |
Applications |
|
UBM Sputtering |
Smooth films with low intrinsic roughness; High reliability and reproducibility of the process; Droplet-free coatings; |
Nitrides, carbides, oxides of Ti, TiAl, Zr, Cr, Ni … Me-DLC DLC |
Cutting and forming tools; Automotive and engineering components; Medical tools and components; Decorative films; |
|
HIPIMS / HIPIMS-Combi Sputtering |
Superhard ceramic films with superior adhesion; Metal ion etching and implantation; High metal ionization rate; |
Nitrides, carbides, oxides of Ti, TiAl, Zr, Cr, Ni …
|
Cutting and forming tools; Automotive and engineering components;
|
|
Cathodic Arc |
Reliable operation with modest costs; High deposition rate; High adhesion; |
Nitrides, carbides, oxides of Ti, TiAl, Zr, Cr, Ni … Ta-C DLC |
Cutting and forming tools; Automotive and engineering components; Decorative films |
|
NoveLC DLC |
Extreme hardness and wear resistance of NoveLC films; Good adhesion; Process reproducibility and scalability; Controlled hydrogen content; |
DLC Me-DLC Electrically conductive DLC |
Cutting and forming tools; Automotive and engineering components; Medical tools and components;
|
Overall dimensions of IMPAX coaters
|
|
IMPAX 750 |
IMPAX 1000 |
IMPAX 1200 |
IMPAX 1500 |
|
Coating Chamber Diameter, mm |
750 |
1000 |
1250 |
1500 |
|
Coating Chamber Height, mm |
900 |
1200 |
1350 |
2100 |
|
Coating Zone Diameter, mm |
500 |
600 |
800 |
1000 |
|
Coating Zone Hieght. Mm |
400 |
750 |
850 |
1500 |
|
Maximum Load Weight, mm |
500 |
800 |
800 |
1500 |
Installed Equipment Examples:
- Coating Sources:
- Rectangular: 1-5 x UBM, HIPIMS and/or cathodic arc (triple purpose cathode)
- Round: multiple sputtering, cathodic arc cathodes or ion sources;
- Target Version: bolted, clamped or bonded types;
- HIPIMS Power Supply: 2KV/2KA or 4KA pulse/cathode;
- UBM Power Supplies: 5 to 30 KW DC or pulsed DC per cathodes;
- Arc Power Supplies: 50V/100 – 210 A per cathode;
- Gas Inlet System: 3-5 individually controlled lines;
Typical floor plans of the IMPAX1200 machine:
